Motorized Stages

Optomechanical systems that stably allow translational and rotational movement of objects over some distance by a power-driven process.

Product	Key Features	Load Capacity	Travel Resolution	Availability	Price (USD)
6-Axis Stage	-	294.2 N (30 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum)	±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 294.2 N (30 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum) Travel Resolution ±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X) Holding Force 100 N (Maximum, Horizontal) 25 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±3 μrad (Repeatability, Unidirectional, in θZ) ±2.5 μrad (Repeatability, Unidirectional, in θY) ±2.5 μrad (Repeatability, Unidirectional, in θX) Weight 12 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Incremental Rotary Backlash 2 μm Typical (in X), 2 μm Typical (in Y), 0.3 μm Typical (in Z), 10 μrad Typical, 5 μrad Typical Minimum Incremental Movement 4 μrad Typical (in θZ), 2 μrad Typical (in θY), 2 μrad Typical (in θX), 0.15 μm Typical (in Z), 0.25 μm Typical (in Y), 0.25 μm Typical (in X) Velocity 25 mrad/s (Typical, in θY) 25 mrad/s (Typical, in θX) 25 mrad/s (Typical, in θZ) 2 mm/s (Typical, in X) 2 mm/s (Typical, in Y) 2 mm/s (Typical, in Z) 30 mrad/s (Maximum, in θZ) 30 mrad/s (Maximum, in θY) 30 mrad/s (Maximum, in θX) 2.5 mm/sec (Maximum, in Z) 2.5 mm/sec (Maximum, in X) 2.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	49.03 N (5 kg, Horizontal, Maximum) 24.52 N (2.5 kg, In Any Orientation, Maximum)	±150 nm (Repeatability, Unidirectional, in Y) ±60 nm (Repeatability, Unidirectional, in Z) ±150 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 49.03 N (5 kg, Horizontal, Maximum) 24.52 N (2.5 kg, In Any Orientation, Maximum) Travel Resolution ±150 nm (Repeatability, Unidirectional, in Y) ±60 nm (Repeatability, Unidirectional, in Z) ±150 nm (Repeatability, Unidirectional, in X) Holding Force 12 N (Maximum, Horizontal) 2 N (Maximum, In Any Orientation) Linear Travel ±17 mm (X Axis) ±16 mm (Y Axis) ±6.5 mm (Z Axis) Angular Resolution ±3 μrad (Repeatability, Unidirectional, in θZ) ±2 μrad (Repeatability, Unidirectional, in θY) ±2 μrad (Repeatability, Unidirectional, in θX) Weight 2.2 kg (Overall) Angular Travel ±21° (Rotation, in θZ) ±10° (Rotation, in θX) ±10° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature 0 - 50 °C Construction Aluminum, Stainless Steel Type of Encoder Incremental Rotary Backlash 0.2 μm Typical (in X), 0.2 μm Typical (in Y), 0.06 μm Typical (in Z), 3 μrad Typical, 2 μrad Typical Minimum Incremental Movement 3 μrad Typical (in θZ), 2 μrad Typical (in θY), 2 μrad Typical (in θX), 0.08 μm Typical (in Z), 0.2 μm Typical (in Y), 0.2 μm Typical (in X) Velocity 250 mrad/s (Typical, in θY) 250 mrad/s (Typical, in θX) 250 mrad/s (Typical, in θZ) 10 mm/s (Typical, in X) 10 mm/s (Typical, in Y) 10 mm/s (Typical, in Z) 500 mrad/s (Maximum, in θZ) 500 mrad/s (Maximum, in θY) 500 mrad/s (Maximum, in θX) 20 mm/s (Maximum, in Z) 20 mm/s (Maximum, in X) 20 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	Vacuum Compatible	24.52 N (2.5 kg, Horizontal, Maximum) 12.26 N (1.25 kg, In Any Orientation, Maximum)	±500 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Key Features Vacuum Compatible Load Capacity 24.52 N (2.5 kg, Horizontal, Maximum) 12.26 N (1.25 kg, In Any Orientation, Maximum) Travel Resolution ±500 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X) Holding Force 15 N (Maximum, Horizontal) 5 N (Maximum, In Any Orientation) Linear Travel ±22.5 mm (X Axis) ±22.5 mm (Y Axis) ±12.5 mm (Z Axis) Angular Resolution ±2.5 μrad (Repeatability, Unidirectional, in θZ) ±3 μrad (Repeatability, Unidirectional, in θY) ±3 μrad (Repeatability, Unidirectional, in θX) Weight 8 kg (Overall) Angular Travel ±12.5° (Rotation, in θZ) ±7.5° (Rotation, in θX) ±7.5° (Rotation, in θY) Type of Drive DC Motor, Direct Drive Operating Temperature -10 to 50 °C Construction Aluminum Backlash 3 μm Typical (in X), 3 μm Typical (in Y), 1.5 μm Typical (in Z), 60 μrad Typical, 20 μrad Typical Minimum Incremental Movement 14 μrad Typical (in θZ), 12 μrad Typical (in θY), 12 μrad Typical (in θX), 1 μm Typical (in Z), 2 μm Typical (in Y), 2 μm Typical (in X) Velocity 28 mrad/s (Typical, in θY) 28 mrad/s (Typical, in θX) 28 mrad/s (Typical, in θZ) 5 mm/s (Typical, in X) 5 mm/s (Typical, in Y) 5 mm/s (Typical, in Z) 135 mrad/s (Maximum, in θZ) 135 mrad/s (Maximum, in θY) 135 mrad/s (Maximum, in θX) 12.5 mm/sec (Maximum, in Z) 12.5 mm/sec (Maximum, in X) 12.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	98.07 N (10 kg, Horizontal, Maximum) 29.42 N (3 kg, In Any Orientation, Maximum)	±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 98.07 N (10 kg, Horizontal, Maximum) 29.42 N (3 kg, In Any Orientation, Maximum) Travel Resolution ±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X) Holding Force 15 N (Maximum, Horizontal) 5 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±3 μrad (Repeatability, Unidirectional, in θZ) ±1.5 μrad (Repeatability, Unidirectional, in θY) ±1.5 μrad (Repeatability, Unidirectional, in θX) Weight 12 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Incremental Rotary Backlash 1.5 μm Typical (in X), 1.5 μm Typical (in Y), 0.25 μm Typical (in Z), 8 μrad Typical, 4 μrad Typical Minimum Incremental Movement 5 μrad Typical (in θZ), 3 μrad Typical (in θY), 3 μrad Typical (in θX), 0.25 μm Typical (in Z), 0.5 μm Typical (in Y), 0.5 μm Typical (in X) Velocity 480 mrad/s (Typical, in θY) 480 mrad/s (Typical, in θX) 480 mrad/s (Typical, in θZ) 40 mm/s (Typical, in X) 40 mm/s (Typical, in Y) 40 mm/s (Typical, in Z) 700 mrad/s (Maximum, in θZ) 700 mrad/s (Maximum, in θY) 700 mrad/s (Maximum, in θX) 60 mm/s (Maximum, in Z) 60 mm/s (Maximum, in X) 60 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	2.452 kN (250 kg, Horizontal, Maximum) 490.3 N (50 kg, In Any Orientation, Maximum)	±600 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±600 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 2.452 kN (250 kg, Horizontal, Maximum) 490.3 N (50 kg, In Any Orientation, Maximum) Travel Resolution ±600 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±600 nm (Repeatability, Unidirectional, in X) Holding Force 2 kN (Maximum, Horizontal) 500 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±9 μrad (Repeatability, Unidirectional, in θZ) ±3 μrad (Repeatability, Unidirectional, in θY) ±3 μrad (Repeatability, Unidirectional, in θX) Weight 17 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Absolute, Rotary Backlash 4 μm Typical (in X), 4 μm Typical (in Y), 0.5 μm Typical (in Z), 60 μrad Typical, 7.5 μrad Typical Minimum Incremental Movement 5 μrad Typical (in θZ), 3 μrad Typical (in θY), 3 μrad Typical (in θX), 0.2 μm Typical (in Z), 0.3 μm Typical (in Y), 0.3 μm Typical (in X) Velocity 3 mrad/s (Typical, in θY) 3 mrad/s (Typical, in θX) 3 mrad/s (Typical, in θZ) 0.3 mm/sec (Typical, in X) 0.3 mm/sec (Typical, in Y) 0.3 mm/sec (Typical, in Z) 6 mrad/s (Maximum, in θZ) 6 mrad/s (Maximum, in θY) 6 mrad/s (Maximum, in θX) 0.5 mm/sec (Maximum, in Z) 0.5 mm/sec (Maximum, in X) 0.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	1.961 kN (200 kg, In Any Orientation, Maximum) 4.903 kN (500 kg, Horizontal, Maximum)	±400 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±400 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 1.961 kN (200 kg, In Any Orientation, Maximum) 4.903 kN (500 kg, Horizontal, Maximum) Travel Resolution ±400 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±400 nm (Repeatability, Unidirectional, in X) Holding Force 5 kN (Maximum, Horizontal) 2 kN (Maximum, In Any Orientation) Linear Travel ±100 mm (X Axis) ±100 mm (Y Axis) ±50 mm (Z Axis) Weight 45 kg (Overall) Angular Travel ±40° (Rotation, in θZ) ±25° (Rotation, in θX) ±25° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Absolute, Rotary Backlash 1 μm Typical (in X), 1 μm Typical (in Y), 0.2 μm Typical (in Z), 6 μrad Typical, 2.5 μrad Typical Minimum Incremental Movement 3 μrad Typical (in θZ), 2 μrad Typical (in θY), 2 μrad Typical (in θX), 0.15 μm Typical (in Z), 0.3 μm Typical (in Y), 0.3 μm Typical (in X) Velocity 35 mrad/s (Typical, in θY) 35 mrad/s (Typical, in θX) 35 mrad/s (Typical, in θZ) 4 mm/s (Typical, in X) 4 mm/s (Typical, in Y) 4 mm/s (Typical, in Z) 37 mrad/s (Maximum, in θZ) 37 mrad/s (Maximum, in θY) 37 mrad/s (Maximum, in θX) 4.5 mm/sec (Maximum, in Z) 4.5 mm/sec (Maximum, in X) 4.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	294.2 N (30 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum)	±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 294.2 N (30 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum) Travel Resolution ±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X) Holding Force 100 N (Maximum, Horizontal) 25 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±3 μrad (Repeatability, Unidirectional, in θZ) ±2.5 μrad (Repeatability, Unidirectional, in θY) ±2.5 μrad (Repeatability, Unidirectional, in θX) Weight 12 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Absolute, Rotary Backlash 2 μm Typical (in X), 2 μm Typical (in Y), 0.3 μm Typical (in Z), 10 μrad Typical, 5 μrad Typical Minimum Incremental Movement 4 μrad Typical (in θZ), 2 μrad Typical (in θY), 2 μrad Typical (in θX), 0.2 μm Typical (in Z), 0.3 μm Typical (in Y), 0.3 μm Typical (in X) Velocity 25 mrad/s (Typical, in θY) 25 mrad/s (Typical, in θX) 25 mrad/s (Typical, in θZ) 2 mm/s (Typical, in X) 2 mm/s (Typical, in Y) 2 mm/s (Typical, in Z) 30 mrad/s (Maximum, in θZ) 30 mrad/s (Maximum, in θY) 30 mrad/s (Maximum, in θX) 2.5 mm/sec (Maximum, in Z) 2.5 mm/sec (Maximum, in X) 2.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	294.2 N (30 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum)	±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 294.2 N (30 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum) Travel Resolution ±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X) Holding Force 100 N (Maximum, Horizontal) 25 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±3 μrad (Repeatability, Unidirectional, in θZ) ±2.5 μrad (Repeatability, Unidirectional, in θY) ±2.5 μrad (Repeatability, Unidirectional, in θX) Weight 12 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Incremental Rotary Backlash 2 μm Typical (in X), 2 μm Typical (in Y), 0.3 μm Typical (in Z), 10 μrad Typical, 5 μrad Typical Minimum Incremental Movement 0.4 μrad Typical (in θZ), 0.2 μrad Typical (in θY), 0.2 μrad Typical (in θX), 0.02 μm Typical (in Z), 0.04 μm Typical (in Y), 0.04 μm Typical (in X) Velocity 25 mrad/s (Typical, in θY) 25 mrad/s (Typical, in θX) 25 mrad/s (Typical, in θZ) 2 mm/s (Typical, in X) 2 mm/s (Typical, in Y) 2 mm/s (Typical, in Z) 30 mrad/s (Maximum, in θZ) 30 mrad/s (Maximum, in θY) 30 mrad/s (Maximum, in θX) 2.5 mm/sec (Maximum, in Z) 2.5 mm/sec (Maximum, in X) 2.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	98.07 N (10 kg, Horizontal, Maximum) 29.42 N (3 kg, In Any Orientation, Maximum)	±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 98.07 N (10 kg, Horizontal, Maximum) 29.42 N (3 kg, In Any Orientation, Maximum) Travel Resolution ±300 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X) Holding Force 15 N (Maximum, Horizontal) 5 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±3 μrad (Repeatability, Unidirectional, in θZ) ±1.5 μrad (Repeatability, Unidirectional, in θY) ±1.5 μrad (Repeatability, Unidirectional, in θX) Weight 12 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Absolute, Rotary Backlash 1.5 μm Typical (in X), 1.5 μm Typical (in Y), 0.2 μm Typical (in Z), 8 μrad Typical, 4 μrad Typical Minimum Incremental Movement 2 μrad Typical (in θZ), 10 μrad Typical (in θY), 10 μrad Typical (in θX), 1 μm Typical (in Z), 1.5 μm Typical (in Y), 1.5 μm Typical (in X) Velocity 480 mrad/s (Typical, in θY) 480 mrad/s (Typical, in θX) 480 mrad/s (Typical, in θZ) 40 mm/s (Typical, in X) 40 mm/s (Typical, in Y) 40 mm/s (Typical, in Z) 700 mrad/s (Maximum, in θZ) 700 mrad/s (Maximum, in θY) 700 mrad/s (Maximum, in θX) 60 mm/s (Maximum, in Z) 60 mm/s (Maximum, in X) 60 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
Hexapod	-	-	2 nm (Repeatability, Bidirectional)	Contact Supplier	Add to cart to request quote
Product Code Travel Resolution 2 nm (Repeatability, Bidirectional) Linear Travel ±6.5 mm, ±8.5 mm, ±16 mm (X Axis) 100 μm (Closed Loop, X Axis) 2 nm Type of Drive Multilayer Piezo Operating Temperature 0 - 50 °C Type of Encoder Incremental Linear Applications SEM Travel XYZ-Axis ±6.5 mm, ±8.5 mm, ±16 mm (Closed Loop) Linearity Error 2% (Entire Travel Range) Minimum Incremental Movement 0.1 (in Z), 0.1 μm (in X) Type of Movement XYZ Velocity 10 mm/s (Maximum) Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	29.42 N (3 kg, Horizontal, Maximum) 14.71 N (1.5 kg, In Any Orientation, Maximum)	±300 nm (Repeatability, Unidirectional, in Y) ±80 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 29.42 N (3 kg, Horizontal, Maximum) 14.71 N (1.5 kg, In Any Orientation, Maximum) Travel Resolution ±300 nm (Repeatability, Unidirectional, in Y) ±80 nm (Repeatability, Unidirectional, in Z) ±300 nm (Repeatability, Unidirectional, in X) Holding Force 15 N (Maximum, Horizontal) Linear Travel ±20 mm (X Axis) ±20 mm (Y Axis) ±6.5 mm (Z Axis) Angular Resolution ±10 μrad (Repeatability, Unidirectional, in θZ) ±2.5 μrad (Repeatability, Unidirectional, in θY) ±2.5 μrad (Repeatability, Unidirectional, in θX) Weight 1.7 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±10° (Rotation, in θX) ±10° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature 0 - 50 °C Construction Aluminum, Stainless Steel Backlash 0.7 μm Typical (in X), 0.7 μm Typical (in Y), 0.2 μm Typical (in Z), 20 μrad Typical, 10 μrad Typical Minimum Incremental Movement 15 μrad Typical (in θZ), 8 μrad Typical (in θY), 8 μrad Typical (in θX), 0.25 μm Typical (in Z), 0.5 μm Typical (in Y), 0.5 μm Typical (in X) Velocity 50 mrad/s (Typical, in θY) 50 mrad/s (Typical, in θX) 50 mrad/s (Typical, in θZ) 3 mm/s (Typical, in X) 3 mm/s (Typical, in Y) 3 mm/s (Typical, in Z) 120 mrad/s (Maximum, in θZ) 120 mrad/s (Maximum, in θY) 120 mrad/s (Maximum, in θX) 6 mm/s (Maximum, in Z) 6 mm/s (Maximum, in X) 6 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	49.03 N (5 kg, Horizontal, Maximum) 24.52 N (2.5 kg, In Any Orientation, Maximum)	±500 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 49.03 N (5 kg, Horizontal, Maximum) 24.52 N (2.5 kg, In Any Orientation, Maximum) Travel Resolution ±500 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X) Holding Force 15 N (Maximum, Horizontal) 5 N (Maximum, In Any Orientation) Linear Travel ±22.5 mm (X Axis) ±22.5 mm (Y Axis) ±12.5 mm (Z Axis) Angular Resolution ±2.5 μrad (Repeatability, Unidirectional, in θZ) ±3 μrad (Repeatability, Unidirectional, in θY) ±3 μrad (Repeatability, Unidirectional, in θX) Weight 8 kg (Overall) Angular Travel ±12.5° (Rotation, in θZ) ±7.5° (Rotation, in θX) ±7.5° (Rotation, in θY) Type of Drive DC Motor, Direct Drive Operating Temperature -10 to 50 °C Construction Aluminum Backlash 1.5 μm Typical (in X), 1.5 μm Typical (in Y), 1 μm Typical (in Z), 30 μrad Typical, 15 μrad Typical Minimum Incremental Movement 14 μrad Typical (in θZ), 12 μrad Typical (in θY), 12 μrad Typical (in θX), 1 μm Typical (in Z), 2 μm Typical (in Y), 2 μm Typical (in X) Velocity 55 mrad/s (Typical, in θY) 55 mrad/s (Typical, in θX) 55 mrad/s (Typical, in θZ) 10 mm/s (Typical, in X) 10 mm/s (Typical, in Y) 10 mm/s (Typical, in Z) 270 mrad/s (Maximum, in θZ) 270 mrad/s (Maximum, in θY) 270 mrad/s (Maximum, in θX) 25 mm/s (Maximum, in Z) 25 mm/s (Maximum, in X) 25 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	Vacuum Compatible	784.5 N (80 kg, Horizontal, Maximum) 392.3 N (40 kg, In Any Orientation, Maximum)	±500 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Key Features Vacuum Compatible Load Capacity 784.5 N (80 kg, Horizontal, Maximum) 392.3 N (40 kg, In Any Orientation, Maximum) Travel Resolution ±500 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X) Holding Force 2 kN (Maximum, Horizontal) 500 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±9 μrad (Repeatability, Unidirectional, in θZ) ±3 μrad (Repeatability, Unidirectional, in θY) ±3 μrad (Repeatability, Unidirectional, in θX) Weight 17 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Ball Screw, DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Incremental Rotary Backlash 4 μm Typical (in X), 4 μm Typical (in Y), 0.5 μm Typical (in Z), 60 μrad Typical, 7.5 μrad Typical Minimum Incremental Movement 5 μrad Typical (in θZ), 3 μrad Typical (in θY), 3 μrad Typical (in θX), 0.2 μm Typical (in Z), 0.3 μm Typical (in Y), 0.3 μm Typical (in X) Velocity 1.2 mrad/s (Typical, in θY) 1.2 mrad/s (Typical, in θX) 1.2 mrad/s (Typical, in θZ) 0.1 mm/sec (Typical, in X) 0.1 mm/sec (Typical, in Y) 0.1 mm/sec (Typical, in Z) 1.8 mrad/s (Maximum, in θZ) 1.8 mrad/s (Maximum, in θY) 1.8 mrad/s (Maximum, in θX) 0.15 mm/sec (Maximum, in Z) 0.15 mm/sec (Maximum, in X) 0.15 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	490.3 N (50 kg, Horizontal, Maximum) 196.1 N (20 kg, In Any Orientation, Maximum)	±500 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 490.3 N (50 kg, Horizontal, Maximum) 196.1 N (20 kg, In Any Orientation, Maximum) Travel Resolution ±500 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X) Holding Force 250 N (Maximum, Horizontal) 85 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±7.5 μrad (Repeatability, Unidirectional, in θZ) ±3 μrad (Repeatability, Unidirectional, in θY) ±3 μrad (Repeatability, Unidirectional, in θX) Weight 17 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Absolute, Rotary Backlash 6 μm Typical (in X), 6 μm Typical (in Y), 1.5 μm Typical (in Z), 90 μrad Typical, 25 μrad Typical Minimum Incremental Movement 15 μrad Typical (in θZ), 7.5 μrad Typical (in θY), 7.5 μrad Typical (in θX), 0.5 μm Typical (in Z), 1 μm Typical (in Y), 1 μm Typical (in X) Velocity 75 mrad/s (Typical, in θY) 75 mrad/s (Typical, in θX) 75 mrad/s (Typical, in θZ) 5 mm/s (Typical, in X) 5 mm/s (Typical, in Y) 5 mm/s (Typical, in Z) 120 mrad/s (Maximum, in θZ) 120 mrad/s (Maximum, in θY) 120 mrad/s (Maximum, in θX) 8 mm/s (Maximum, in Z) 8 mm/s (Maximum, in X) 8 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	294.2 N (30 kg, Horizontal, Maximum) 147.1 N (15 kg, In Any Orientation, Maximum)	±250 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 294.2 N (30 kg, Horizontal, Maximum) 147.1 N (15 kg, In Any Orientation, Maximum) Travel Resolution ±250 nm (Repeatability, Unidirectional, in Y) ±100 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X) Holding Force 300 N (Maximum, Horizontal) 150 N (Maximum, In Any Orientation) Linear Travel ±27.5 mm (X Axis) ±25 mm (Y Axis) ±14 mm (Z Axis) Angular Resolution ±2.5 μrad (Repeatability, Unidirectional, in θZ) ±2 μrad (Repeatability, Unidirectional, in θY) ±2 μrad (Repeatability, Unidirectional, in θX) Weight 10 kg (Overall) Angular Travel ±19° (Rotation, in θZ) ±11.5° (Rotation, in θX) ±10.5° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Absolute, Rotary Backlash 3 μm Typical (in X), 3 μm Typical (in Y), 1 μm Typical (in Z), 25 μrad Typical, 20 μrad Typical Minimum Incremental Movement 4 μrad Typical (in θZ), 3.5 μrad Typical (in θY), 3.5 μrad Typical (in θX), 0.25 μm Typical (in Z), 0.3 μm Typical (in Y), 0.3 μm Typical (in X) Velocity 5.5 mrad/s (Typical, in θY) 5.5 mrad/s (Typical, in θX) 5.5 mrad/s (Typical, in θZ) 2 mm/s (Typical, in X) 2 mm/s (Typical, in Y) 2 mm/s (Typical, in Z) 27 mrad/s (Maximum, in θZ) 27 mrad/s (Maximum, in θY) 27 mrad/s (Maximum, in θX) 2.5 mm/sec (Maximum, in Z) 2.5 mm/sec (Maximum, in X) 2.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	Vacuum Compatible	245.2 N (25 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum)	±500 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Key Features Vacuum Compatible Load Capacity 245.2 N (25 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum) Travel Resolution ±500 nm (Repeatability, Unidirectional, in Y) ±200 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X) Holding Force 250 N (Maximum, Horizontal) 85 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±7.5 μrad (Repeatability, Unidirectional, in θZ) ±3 μrad (Repeatability, Unidirectional, in θY) ±3 μrad (Repeatability, Unidirectional, in θX) Weight 17 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Ball Screw, DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Incremental Rotary Backlash 6 μm Typical (in X), 6 μm Typical (in Y), 1.5 μm Typical (in Z), 90 μrad Typical, 25 μrad Typical Minimum Incremental Movement 15 μrad Typical (in θZ), 7.5 μrad Typical (in θY), 7.5 μrad Typical (in θX), 0.5 μm Typical (in Z), 1 μm Typical (in Y), 1 μm Typical (in X) Velocity 25 mrad/s (Typical, in θY) 25 mrad/s (Typical, in θX) 25 mrad/s (Typical, in θZ) 2 mm/s (Typical, in X) 2 mm/s (Typical, in Y) 2 mm/s (Typical, in Z) 30 mrad/s (Maximum, in θZ) 30 mrad/s (Maximum, in θY) 30 mrad/s (Maximum, in θX) 2.5 mm/sec (Maximum, in Z) 2.5 mm/sec (Maximum, in X) 2.5 mm/sec (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	588.4 N (60 kg, Horizontal, Maximum) 294.2 N (30 kg, In Any Orientation, Maximum)	±2 μm (Repeatability, Unidirectional, in Y) ±500 nm (Repeatability, Unidirectional, in Z) ±2 μm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 588.4 N (60 kg, Horizontal, Maximum) 294.2 N (30 kg, In Any Orientation, Maximum) Travel Resolution ±2 μm (Repeatability, Unidirectional, in Y) ±500 nm (Repeatability, Unidirectional, in Z) ±2 μm (Repeatability, Unidirectional, in X) Holding Force 600 N (Maximum, Horizontal) 300 N (Maximum, In Any Orientation) Linear Travel ±150 mm (X Axis) ±150 mm (Y Axis) ±85 mm (Z Axis) Angular Resolution ±9 μrad (Repeatability, Unidirectional, in θZ) ±5 μrad (Repeatability, Unidirectional, in θY) ±5 μrad (Repeatability, Unidirectional, in θX) Weight 65.5 kg (Overall) Angular Travel ±50° (Rotation, in θZ) ±30° (Rotation, in θX) ±30° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature 0 - 50 °C Construction Aluminum Type of Encoder Incremental Rotary Backlash 20 μm Typical (in X), 20 μm Typical (in Y), 5 μm Typical (in Z), 90 μrad Typical, 50 μrad Typical Minimum Incremental Movement 50 μrad Typical (in θZ), 30 μrad Typical (in θY), 30 μrad Typical (in θX), 3 μm Typical (in Z), 5 μm Typical (in Y), 5 μm Typical (in X) Velocity 130 mrad/s (Typical, in θY) 130 mrad/s (Typical, in θX) 130 mrad/s (Typical, in θZ) 20 mm/s (Typical, in X) 20 mm/s (Typical, in Y) 20 mm/s (Typical, in Z) 550 mrad/s (Maximum, in θZ) 550 mrad/s (Maximum, in θY) 550 mrad/s (Maximum, in θX) 85 mm/s (Maximum, in Z) 85 mm/s (Maximum, in X) 85 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	196.1 N (20 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum)	±1.5 μm (Repeatability, Unidirectional, in Y) ±500 nm (Repeatability, Unidirectional, in Z) ±1.5 μm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 196.1 N (20 kg, Horizontal, Maximum) 98.07 N (10 kg, In Any Orientation, Maximum) Travel Resolution ±1.5 μm (Repeatability, Unidirectional, in Y) ±500 nm (Repeatability, Unidirectional, in Z) ±1.5 μm (Repeatability, Unidirectional, in X) Holding Force 200 N (Maximum, Horizontal) 5 N (Maximum, In Any Orientation) Linear Travel ±50 mm (X Axis) ±50 mm (Y Axis) ±25 mm (Z Axis) Angular Resolution ±25 μrad (Repeatability, Unidirectional, in θZ) ±8 μrad (Repeatability, Unidirectional, in θY) ±8 μrad (Repeatability, Unidirectional, in θX) Weight 15 kg (Overall) Angular Travel ±30° (Rotation, in θZ) ±15° (Rotation, in θX) ±15° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature 0 - 50 °C Construction Aluminum Type of Encoder Incremental Rotary Backlash 30 μm Typical (in X), 30 μm Typical (in Y), 3 μm Typical (in Z), 300 μrad Typical, 30 μrad Typical Minimum Incremental Movement 12.5 μrad Typical (in θZ), 12.5 μrad Typical (in θY), 12.5 μrad Typical (in θX), 5 μm Typical (in Z), 5 μm Typical (in Y), 5 μm Typical (in X) Velocity 20 mrad/s (Typical, in θY) 20 mrad/s (Typical, in θX) 20 mrad/s (Typical, in θZ) 2 mm/s (Typical, in X) 2 mm/s (Typical, in Y) 2 mm/s (Typical, in Z) 200 mrad/s (Maximum, in θZ) 200 mrad/s (Maximum, in θY) 200 mrad/s (Maximum, in θX) 20 mm/s (Maximum, in Z) 20 mm/s (Maximum, in X) 20 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI
Hexapod	-	-	2 nm (Repeatability, Bidirectional)	Contact Supplier	Add to cart to request quote
Product Code Travel Resolution 2 nm (Repeatability, Bidirectional) Linear Travel ±6.5 mm, ±8.5 mm, ±16 mm (X Axis) 100 μm (Closed Loop, X Axis) 2 nm Type of Drive Multilayer Piezo Operating Temperature 0 - 50 °C Type of Encoder Incremental Linear Applications SEM Travel XYZ-Axis ±6.5 mm, ±8.5 mm, ±16 mm (Closed Loop) Linearity Error 2% (Entire Travel Range) Minimum Incremental Movement 0.1 (in Z), 0.1 μm (in X) Type of Movement XYZ Velocity 10 mm/s (Maximum) Supplier Location Massachusetts, USA See product details More from PI
6-Axis Stage	-	147.1 N (15 kg, Horizontal, Maximum) 73.55 N (7.5 kg, In Any Orientation, Maximum)	±500 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X)	Contact Supplier	Add to cart to request quote
Product Code Load Capacity 147.1 N (15 kg, Horizontal, Maximum) 73.55 N (7.5 kg, In Any Orientation, Maximum) Travel Resolution ±500 nm (Repeatability, Unidirectional, in Y) ±150 nm (Repeatability, Unidirectional, in Z) ±500 nm (Repeatability, Unidirectional, in X) Holding Force 10 N (Maximum, Horizontal) 5 N (Maximum, In Any Orientation) Linear Travel ±27.5 mm (X Axis) ±25 mm (Y Axis) ±14 mm (Z Axis) Angular Resolution ±3 μrad (Repeatability, Unidirectional, in θZ) ±1.5 μrad (Repeatability, Unidirectional, in θY) ±2 μrad (Repeatability, Unidirectional, in θX) Weight 10 kg (Overall) Angular Travel ±19° (Rotation, in θZ) ±11.5° (Rotation, in θX) ±10.5° (Rotation, in θY) Type of Drive Brushless DC Motor Operating Temperature -10 to 50 °C Construction Aluminum Type of Encoder Absolute, Rotary Backlash 1.5 μm Typical (in X), 1.5 μm Typical (in Y), 1 μm Typical (in Z), 25 μrad Typical, 15 μrad Typical Minimum Incremental Movement 12 μrad Typical (in θZ), 7 μrad Typical (in θY), 7 μrad Typical (in θX), 0.5 μm Typical (in Z), 1 μm Typical (in Y), 1 μm Typical (in X) Velocity 55 mrad/s (Typical, in θY) 55 mrad/s (Typical, in θX) 55 mrad/s (Typical, in θZ) 20 mm/s (Typical, in X) 20 mm/s (Typical, in Y) 20 mm/s (Typical, in Z) 270 mrad/s (Maximum, in θZ) 270 mrad/s (Maximum, in θY) 270 mrad/s (Maximum, in θX) 25 mm/s (Maximum, in Z) 25 mm/s (Maximum, in X) 25 mm/s (Maximum, in Y) Type of Movement 6-Axis Supplier Location Massachusetts, USA See product details More from PI